Extended Life Filter Bags (POEX/PEEX)
Features
- Excellent filtration on many contaminants - gels, particles with wide range of sizes and particles with irregular shapes
- Twice the standard dirt-holding capacity of traditional felt bags to provide longer service life.
Polysorb Adsorbents
- Replaces sorbent granules, shop rags or solvents for better reliability, ease of use, cost-efficiency and speed.
- Adsorbs 13 to 25 times its own weight in petroleum based liquids in seconds(based on density and viscosity of liquid)
- Completely reusable, may be wrung out and used again
- Can also be used to help skim oils off coolant tanks
GF125 Mass Flow Controller (MFC)
The flagship GF125 is a second generation multi-variable, pressure transient insensitive mass flow controller. GF125 builts with pressuretransient insensitive (PTI) mass flow controller technology, minimizing process gas flow variation due to pressure and temperature fluctuations.
The GF125 enables customer to reduce cost by eliminating the needs of pressure regulators, pressure transducers and etc
The GF125 enables customer to reduce cost by eliminating the needs of pressure regulators, pressure transducers and etc
XacTorr CMX Series Capacitance Manometers
The XacTorr CMX series gauges are premium, heated capacitance manometers, that use patented, dual zone heating to ensure 0.1oC temperature uniformity. The sensor very quickly recovers from thermal events and is virtually immune to ambient temperature changes. Three operating temperatures are offered, 45C, 100C, and 160C with full-scale measurement ranges from 100 milliTorr to 1000 Torr.
Bearingless Centrifugal Pump System
A New Standard for Magnetically Levitated Centrifugal Pumps
- Levitronix has developed a Bearingless Centrifugal Pump for the semiconductor industry based on proprietary magnetic levitation technology.
- With the Levitronix technology, a pump rotor is suspended and driven by the magnetic field of a motor/bearing stator through the wall of the pump housing without mechanical contact.
Direct Liquid Injection Vaporizer System
The Brooks family of extremely high-performing direct liquid injection (DLI) vaporizer solutions is designed for customers who require reliable liquid vaporization.Featuring unique atomization and heat exchanger technologies, these vapor delivery systems deliver pure vapor for every application.
Brooks' vaporizer technology overcomes many limitations of conventional vapor delivery systems.
LEVIFLOW LFS-008 Low-flow Flowmeter
LEVIFLOW® flowmeter series is designed for non invasive high precision flow measurements of high purity fluids.The LFS-008 flowmeter is able to measure flows from 800 ml/min down to 1 ml/min.
- No contamination due to non-invasive measurement
- High accuracy (1% of reading) and repeatability (≤ 0.5%)
- No moving parts -> no particle generation
- Improved bubble robustness due to DSP technology
Planargard Point-of-use Cartridge Filters for slurries in CMP
Graded-Density Filter Technology
- The Planargard filter relies on a graded-density depth filter design that enables it to retain defect causing agglomerates in each of its four layers. This design provides excellent retention of agglomerates while allowing desired slurry particles to reach the surface of the wafer.
Aeronex Z2 Series Gas Purifiers
Continuous ultrapure XCDA® purge gas at a low cost of ownership
- The Aeronex Gas Purification System Z2 Series, is the latest continuous service bulk gas purification system from Entegris. The Entegris AGPS represents the culmination of 15 years of experience in gas purification and delivery technologies.
Aeronex Z Series Gas Purification System
Continuous ultrapure XCDA® purge gas at a low cost of ownership
- The Aeronex Z Series removes gaseous contaminants such as SO2, Sox, NOx, H2S, H2O, CO2, siloxanes, ammonia, amines, acid gasses, alcohols and non-methane hydrocarbons to sub ppb levels in CDA (air) gas.
GateKeeper Hydride Gas Purifiers
Cost-effective, environmentally friendly gas purification
- Available for low and high-flow point-of-use applications, GateKeeper hydride gas purifiers are designed for use with NH3, AsH3, PH3, SiH4 and GeH4. The purifier remove O2, CO2, H2O and oxidation byproducts to sub ppb levels.
GateKeeper Optics Gas Purifiers
Cost-effective, environmentally friendly gas purification
- Available for low and high-flow point-of-use applications, GateKeeper optics gas purifiers are designed for use with CDA (air). The purifiers remove NOx, H2S, H2O, CO2, NH3, amines, acid gases and alcohols to sub ppb levels; SO2, NMHCs and siloxanes to sub ppt levels.
