Bulk Gas Purifiers
High-flow gas purification
- Entegris Gatekeeper 200M bulk gas purifiers are ideal for facility purification and as backup to the AGPS auto regen system or other bulk purification system. Available for clean dry air and inert gases, the 200M removes impurities such as H2O, CO2 and O2 to sub ppb levels at flow rates up to 20,000 SLM.
Planarcore® PVA Brushes
- Optimized for the needs of next-generation copper and ILD applications
- Designed with molded-through-the-core construction
- Polypropylene mandrel and polyvinyl alcohol (PVA) brush construction
Planarcore PVA Brushes
- Entegris introduces a revolutionary advancement in PVA brushes, the Planarcore cleaning product for semiconductor applications. Patent pending* and proprietary design yields a disposable brush that reduces tool downtime and decreases on-wafer defectivity.
Surface Mount and Face Seal
- The TD series is a group of compact, low pressure 1/4 inch UHP diaphragm valves available in both surface mount and conventional designs. The surface mount design is available in both 1.125 and 1.5 inch configurations for both w-seal and c-seal substrates. Face seal and butt weld end connections are also standard in both conventional and block valve designs.
Surface Mount Substrates
Surface Mount Substrates: K1S Series - C-Seal
- KITZ SCT is a licensed manufacturer of the K1S Ultra High-Purity Modular Substrates.
High-Pressure Diaphragm Valve
- A new, high pressure valve that is compactly designed and has a simple external appearance to match today’s needs.
- Reduced torque and improved durability are added to the manual valve.
- Simple and compact piping system is made possible by using the automatic valve that has a slim cylinder shape with an air piping in the upper side.
SCF Series: Tubular
- KITZ SCT continues to advance fitting technology to meet and exceed the stringent requirements of semiconductor manufacturing and ultra-high vacuum systems. With highly developed machining capabilities, superior materials and advanced surface chemistry, KITZ SCT fittings exceed the relevant JIS, SEMI, ANSI, and ASTM specifications.
KD Series
The KD series is the most diverse product family for low pressure, conventional diaphragm valves ranging in size from 1/8 to 3/4 inch. 
- High flow applications (to 2.4Cv)
- High temperature (to 250° C)
- High speed operation ( 5 msec)
Gate Valves
Gate Valves: UXG Series and LG Series
- KITZ SCT offers two types of Gate Valves for the semiconductor tool industry. These two designs dramatically cut down tool down-time and reduce particle generation.
L-type Vacuum Bellows Seal Hot Valve
- The IVBH Series presents a unique line of vacuum valves that feature a heater built into the bellows capable of operation in tandem with the valve body thus enabling heating of both the bellows and the valve body with the valve in either open or closed position.
Keyword (Please do not delete, customer reference)
- Filtration And Purification
- Mass Flow Controller(MFC)
- Valves & Fitting For Ultra High Purify Gases
- Pressure Measurement
- Membrane Filter